MEMS微针阵列干电极及其在生理电信号采集中的应用

doi:10.3969/j.issn.0258-8021. 2015.05.010

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摘要生理电信号能直接反映人们的身体状况，且随着各种便携式设备、穿戴式设备的出现，生理电信号的采集得到越来越多的重视。近年来，许多研究人员致力于生理电信号采集电极的研究，因此基于MEMS技术的微针阵列干电极逐渐成熟。微针阵列干电极通过微针刺入被测者的皮肤，实现连续、长期、高效的生理电信号采集，由于其成本低、操作简单、不会使被测者感到不适、采集质量高等优点，逐渐取代传统湿电极而得到越来越广泛的应用。通过将微针阵列干电极与湿电极进行对比，突出微针阵列干电极的研究价值；结合国内外最新研究，综述微针阵列干电极的制作工艺、微针阵列干电极的改进技术、在生理电信号采集中的应用现状；讨论目前微针阵列干电极存在的不足，并对以后的发展趋势进行展望。

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	蒋小梅张俊然^*张坤周博陈富琴

关键词 ： MEMS, 微针阵列, 干电极, 生理电信号

Abstract：Electrophysiological signals directly reflect health status, and with the emergence of a variety of portable devices and wearable devices, electrophysiological signals acquisition is gaining more and more attention. In recent years, many researchers working on the acquisition electrodes of electrophysiological signals, so the microneedle array of dry electrodes based on microelectromechanical system (MEMS) technologies became mature gradually. The microneedle array of dry electrodes achieve electrophysiological signals acquisition continuously, chronically, effectively by using microneedles to penetrate into the examinee’s skin. Mironeedle array of dry electrodes gradually replace the traditional wet electrodes and get increasingly used because of its advantages of low cost, simple operation, not upset examinee, high quality of the acquisition. This article highlights the research value of microneedle array of dry electrodes by comparing with wet electrodes; combined with the latest research at home and abroad, reviews the processing technologies, improving technologies, and application status in the electrophysiological signals acquisition of microneedle array of dry electrodes; discusses the existing deficiencies of microneedle array of dry electrodes and makes a prospect for the future development trend.

Key words： microelectromechanical system (MEMS) microneedle array dry electrodes physiological signals

基金资助:国家自然科学基金(81000605,81110108007);广东省自然科学基金重点(S20120200-10867);四川省科技计划项目(2015HH0036)

引用本文:

蒋小梅张俊然^*张坤周博陈富琴. MEMS微针阵列干电极及其在生理电信号采集中的应用[J]. 中国生物医学工程学报, 2015, 34(5): 589-597.
Jiang Xiaomei Zhang Junran^* Zhang Kun Zhou Bo Chen Fuqin
. The Microneedle Array of Dry Electrodes Based on MEMS and its Applications in the Electrophysiological Signals Acquisition. journal1, 2015, 34(5): 589-597.

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http://cjbme.csbme.org/CN/10.3969/j.issn.0258-8021. 2015.05.010 或 http://cjbme.csbme.org/CN/Y2015/V34/I5/589

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