@article{郭庆:705, author = {郭庆, 李妍, 高尚, 张培玉}, title = {采用牺牲层技术的电容式微机械超声传感器的仿真与分析}, publisher = {中国生物医学工程学报}, year = {2018}, journal = {中国生物医学工程学报}, volume = {37}, number = {6}, eid = {705}, numpages = {8}, pages = {705}, keywords = {电容式微机械超声传感器;共振频率;有限元仿真;生物MEMS}, url = {http://cjbme.csbme.org/CN/abstract/article_893.shtml}, doi = {10.3969/j.issn.0258-8021.2018.06.009} }